Fabrication methods for a quantum cascade photonic crystal surface emitting laser

Citation:

DM Tennant, R Colombelli, K Srinivasan, M Troccoli, O Painter, C Gmachi, F Capasso, AM Sergent, DL Sivco, and AY Cho. 2003. “Fabrication methods for a quantum cascade photonic crystal surface emitting laser.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 21, 6, Pp. 2907-2911.

Abstract:

Conventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers. 2003 American Vacuum Society.

Notes:

47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN), TAMPA, FLORIDA, MAY 27-30, 2003