Fabrication methods for a quantum cascade photonic crystal surface emitting laser


DM Tennant, R Colombelli, K Srinivasan, M Troccoli, O Painter, C Gmachi, F Capasso, AM Sergent, DL Sivco, and AY Cho. 2003. “Fabrication methods for a quantum cascade photonic crystal surface emitting laser.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 21, 6, Pp. 2907-2911.


Conventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers. 2003 American Vacuum Society.


47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN), TAMPA, FLORIDA, MAY 27-30, 2003