@article { ISI:000188193600117,
	title = {Fabrication methods for a quantum cascade photonic crystal surface emitting laser},
	journal = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY B},
	volume = {21},
	number = {6},
	year = {2003},
	note = {47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN), TAMPA, FLORIDA, MAY 27-30, 2003},
	month = {NOV-DEC},
	pages = {2907-2911},
	publisher = {A V S AMER INST PHYSICS},
	type = {Article; Proceedings Paper},
	address = {STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747-4502 USA},
	abstract = {Conventional quantum cascade (QC) lasers are intrinsically edge-emitting devices with mode confinement achieved via a standard mesa stripe configuration. Surface emission in edge emitting QC lasers has therefore necessitated redirecting the waveguided laser emission using a second order grating. This paper describes the methods used to fabricate a 2D photonic crystal (PC) structure with or without a central defect superimposed on an electrically pumped QC laser structure with the goal of achieving direct surface emission. A successful systematic study of PC hole radius and spacing was performed using e-beam lithography. This PC method offers the promise of a number of interesting applications, including miniaturization and integration of QC lasers. 2003 American Vacuum Society.},
	issn = {1071-1023},
	doi = {10.1116/1.1627815},
	author = {Tennant, DM and Colombelli, R and Srinivasan, K and Troccoli, M and Painter, O and Gmachi, C and F. Capasso and Sergent, AM and Sivco, DL and Cho, AY}
}
