@article { ISI:000261385600006,
	title = {Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates},
	journal = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY B},
	volume = {26},
	number = {6},
	year = {2008},
	month = {NOV},
	pages = {1848-1851},
	publisher = {A V S AMER INST PHYSICS},
	type = {Article},
	address = {STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747-4502 USA},
	abstract = {The authors demonstrate 1.6 GHz surface acoustic wave (SAW) generation using interdigital transducers patterned by e-beam lithography on a thin ZnO piezoelectric film deposited on an InP substrate. The highly oriented, dense, and fine-grain ZnO film with high resistivity was deposited by radio frequency magnetron sputtering and was characterized by x-ray diffraction, scanning electron microscopy, atomic force microscopy, and a four-point probe station. The acoustic wavelength of the 1.6 GHz SAW generated by exciting the interdigital transducer on ZnO/InP with a microwave signal is 1.6 mu m. This SAW filter device could be monolithically integrated with optoelectronic devices, opening new opportunities to use SAWs for applications such as gigahertz-frequency filters on optoelectronic devices and novel widely tunable quantum cascade lasers.},
	keywords = {atomic force microscopy, electrical resistivity, electron beam lithography, II-VI semiconductors, piezoelectric materials, scanning electron microscopy, semiconductor thin films, sputter deposition, surface acoustic wave filters, surface acoustic waves, wide band gap semiconductors, Zinc Compounds},
	issn = {1071-1023},
	doi = {10.1116/1.2993176},
	author = {Wang, Qijie and Pfluegl, Christian and Andress, William F. and Ham, Donhee and Federico Capasso and Yamanishi, Masamichi}
}
