@article { ISI:000427000500003,
	title = {Dynamic metasurface lens based on MEMS technology},
	journal = {APL PHOTONICS},
	volume = {3},
	number = {2},
	year = {2018},
	month = {FEB},
	publisher = {AMER INST PHYSICS},
	type = {Article},
	address = {1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA},
	abstract = {In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by +/- 9 degrees, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems. (C) 2018 Author(s).},
	issn = {2378-0967},
	doi = {10.1063/1.5018865},
	author = {Tapashree Roy and Zhang, Shuyan and Il Woong Jung and Troccoli, Mariano and Federico Capasso and Daniel Lopez}
}
